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产品概述/Product Introduction:
♦ 主要用于半导体器件退火及烧结等工艺,可进行真空、气体保护等
Mainly used for annealing and sintering of semiconductor devices, and can be protected by vacuum and gas
♦ 设备结构新颖,操作方便
The equipment has novel structure and convenient operation
♦ 在一台设备上可以完成多个工艺流程
Multiple process flows can be completed on one equipment
产品特点/Product Characteristics:
♦ 自动化程度高
High degree of automation
♦ 采用进口温度控制器,温控器能受控运行、停止、保持,灵活控制工艺温度变化
Adopting imported temperature controller, the temperature controllercan be controlled to run, stop andmaintain, and flexibly control the process temperature change
♦ 电气元器件采用进口知名品牌元器件,保证了设备具有较好的稳定性、可靠性
The electrical components are imported well-known brand components, which ensures good stability andreliability of the equipment
♦ 处理全过程由工业计算机智能化自动控制化能够实现全程监控、跟踪、自诊断功能、模拟显示设备的工作状态,升温和降温速度可控
The whole processing process is controlled by industrial computer intelligently and automatically, which canrealize the functions of whole process monitoring,tracking and self-diagnosis, simulate and display the workingstate of equipment, and control the heating and cooling speed
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